Glow discharge method and apparatus

ABSTRACT

A method and apparatus for providing a completely closed plasma trap in an r.f. type glow discharge system to enable enhanced sputtering from a pair of electrodes so that substrates may be suitably coated. The electrode pairs may be post type, hollow or planar, in various shapes with and without end wings. All configurations utilize a cooperating magnetic field, provided by field coils external or internal to the electrodes, the magnetic field being shaped to define with the electrodes at least one plasma containing trap having axial symmetry imposed by the magnetic field and/or the electrode structure. The trap may be defined by the pair of electrodes acting in concert with each other and the magnetic field, one or more traps may be defined separately by each electrode and the magnetic field, or both types of traps may exist simultaneously in a hybrid situation. Means are also disclosed for mounting, centering, cooling, assembling and making electrical contact with various of the electrode structures. Means are further disclosed for protecting various structural elements from undesired exposure to plasma, preventing conductive plating of insulators, due to undesired deposition of target material, and shielding the entire glow discharge system to prevent undesired r.f. radiation leakage to the surrounding environment.

CROSS-REFERENCES TO RELATED APPLICATIONS

This is a division of application Ser. No. 535,429, filed Dec. 12, 1974,now U.S. Pat. No. 4,041,353, which is a continuation of Ser. No.254,504, filed May 18, 1972, now abandoned and a continuation-in-part ofSer. No. 178,240 filed Sept. 7, 1971, now U.S. Pat. No. 3,884,793; allof the disclosure in the parent application Serial No. 178,240 isspecifically incorporated by reference in this application.

BACKGROUND OF THE INVENTION

This invention relates generally to improvements in glow dischargesystems and, more particularly, to a new and improved method andapparatus utilizing electrode type glow discharge devices to enableenhancement of r.f. sputtering and related glow discharge applications,whereby improved economy, efficiency, and overall performance isfacilitated by suitable choice of electrode and magnetic fieldconfigurations.

A wide variety of electrode type glow discharge devices have beendeveloped and used for sputtering a suitable cathode target materialonto a substrate. Much of the literature describing prior art efforts inthis area is referenced in the aforementioned copending application Ser.No. 178,240.

In the sputtering process, a target composed of the material to bedeposited on a substrate is placed within a gas discharge environment,and this target is electrically connected as a cathode electrode. Ionsfrom the gas discharge bombard the target and drive off, that is,sputter, atoms of the target material. The substrate or item to becoated is suitably located with respect to the cathode, so that it is inthe path of the sputtered atoms. Accordingly, a coating of the targetmaterial forms on the substrate surface exposed to the impingingsputtered atoms.

The sputtered yield (atoms sputtered per incident ion) depends on theenergy of the incident ion upon the target surface, the yield increasingwith increasing ion energy. Thus, the sputtering rate is a function ofboth the rate at which ions impact on the cathode surface and the energyof the bombarding ions. The ion energy and rate of impact is dependentupon the rate of ionization of gas in the glow discharge and thelocation of the region of ionization with respect to the cathode. Inthis regard, it is desirable that ions be produced as close as possibleto the cathode surface, so that there is a greater likelihood of theions being drawn to the cathode rather than being lost to adjacentstructures such as the walls of the discharge chamber.

In the case where the target electrode is also the primary cathode formaintaining the gas discharge, the ionization in such a discharge ismaintained largely by the "primary electrons" exiting from the cathodesheath adjacent the cathode, the primary electrons having been initiallyemitted as secondary electrons released from the cathode target surfaceby impact of the incident ions and by photo-emission. These secondaryelectrons are accelerated in the cathode sheath and become the so-calledprimary electrons in glow discharge theory. It is these electrons whichproduce ionization by colliding with the neutral gas atoms within thesheath and the volume of the glow discharge. The latter volume, outsidethe cathode sheath, is essentially a region of nearly uniform electricalpotential consisting of a mixture of gas atoms, ions and electrons andis referred to as the "plasma".

The mean free path of the primary electrons in the plasma increases withthe energy of these primary electrons and, hence, with the voltageapplied to the discharge, and also varies inversely with the gaspressure in the discharge chamber. Therefore, when the discharge isoperated at low pressures and high voltages in order to maximize ionbombarding energies, the resulting primary electrons acquire highenergies with the consequence that they either produce ions at a pointfar from the cathode, or are lost to the walls of the discharge chamberbefore they produce any ionization at all. Hence, the ionization processis favored by increasing the gas pressure in the discharge. However,such an increase in the gas pressure reduces the energy of the ionsbombarding the cathode target surface and severely dissipates themotions of the sputtered target material in its migration to thesubstrate to be coated so that the sputtered atoms are caused to follownon-linear paths. As a result, some of the basic advantages of thesputtering process are lost by high pressure operation.

Accordingly, a glow discharge technique is desired which permits anintense glow discharge to be maintained over the target surface atrelatively low gas pressures and at lower voltages than have heretoforebeen necessary. Glow discharge systems suitable for such operation inconnection with sputtering of electrically conductive materials andrelated applications are disclosed in the aforementioned copendingparent application Ser. No. 178,240. However, it is well known in theplasma physics arts that the conventional methods of d.c. sputtering forconductive target materials are not applicable to the sputtering ofelectrically insulating target materials, since accumulation ofelectrical charge on the insulating target material limits thebombarding ion current flow to a value that is too small for practicalapplications.

The difficulties encountered in attempting to d.c. sputter material froman electrically insulating target have generally been overcome by usingthe technique of r.f. sputtering whereby an electrically conductingplate is placed behind and closely adjacent a dielectric target to besputtered, and the conducting plate is biased by a high frequencypotential, typically in the megacycle range. Accordingly, an r.f.dielectric current passes through the insulating target to effectivelyremove any charge accumulation from the target surface and enable ionbombardment sputtering on a sustained basis.

In recent years, the technique of r.f. sputtering has been the subjectof increasing interest for depositing coatings of semiconducting andinsulating materials, as well as for depositing coatings of theconductive materials with which the aforementioned patent applicationSer. No. 178,240 is primarily concerned. For example, the use of sputterdeposited insulators such as aluminum oxide has expanded from theoriginal thin film electronics applications to the provision ofrelatively thick coatings for the protection of machine parts againstcorrosion and wear. In both of these latter applications, it isdesirable that large areas be sputter coated at relatively highdeposition rates.

A wide variety of r.f. sputtering systems has been disclosed by theprior art. Illustrative examples of such systems are set forth in apaper by G. S. Anderson, William N. Mayer, and G. K. Wehner, appearingin the Journal of Applied Physics, Volume 33, No. 10, October 1962,pages 2991-2992; a paper by P. D. Davidse and L. I. Maissel, appearingin the Journal of Applied Physics, Volume 37, No. 2 February 1966, pages574-579; a paper by L. Holland, T. Putner and G. N. Jackson, appearingin the Journal of Scientific Instruments (J. Phys. E, Ser. 2), Vol. 1,January 1968, pages 32-34; U.S. Pat. No. 3,305,473 issued to R. M.Moseson in February, 1967; an article by B. A. Probyn appearing in themagazine Vacuum, Volume 18, No. 5, May 1968, pages 253-257; a paper byP. Beucherie, M. Block, and J. G. Wurm, appearing in the Journal of theElectrochemical Society, Volume 116, No. 1, January 1969, pages 159-160;an article by F. Kloss and L. Herte, appearing in SCP and Solid StateTechnology in December, 1967, pages 45-49, 75.

Most of the prior art r.f. sputtering devices have involved the use ofplanar target configurations, oftentimes with combined r.f. and d.c.assist discharges, and some sputtering devices have made use ofexternally applied magnetic fields.

A wide variety of different r.f. sputtering structural configurationshave been developed and are described in the literature, including theso called "grounded r.f. plasma diode", "double electrode"configurations, glow discharge triode systems, tent arrangements,post-type electrode configurations, and structures which includethermionic filaments.

Unfortunately, however, while there has been constant improvement,change and evolution of methods and apparatus in the glow dischargefield, each of the prior art systems is characterized by a number ofdeficiencies which detract from their suitability for various glowdischarge and sputtering applications. These problems include high cost,complexity, inefficiency, low sputtering yield, the occurrence ofsputtering from undesired surfaces within the apparatus, small usabledeposition area, high voltage requirements, substantial coupling betweenthe processes that maintain the plasma discharge and those that controlthe sputtering rate with consequent severe limitations upon theoperational range of the apparatus, high gas pressure requirements, lackof versatility, r.f. leakage, dependence upon target to substratedistance, deposited film contamination, the existence of ion densitygradients in the plasma region that bathes the target, non-uniformsputtering, undue and unavoidable substrate heating, the requirement formultiple power supplies, impractibility of scaling to large targetsizes, and end losses causing axial variations in the sputtering rateand limiting low pressure performance.

Hence, those concerned with the development and use of glow dischargesystems have long recognized the need for improved methods and apparatusin this field to facilitate more versatile and efficient glow dischargesystems useful for such applications as sputtering, polymerization,vapor deposition, light sources and radiation sources, which areeconomical, efficient and avoid the aforedescribed difficultiesencountered with prior art systems. The present invention clearlyfulfills this need.

SUMMARY OF THE INVENTION

Briefly, and in general terms, the present invention provides a new andimproved method and apparatus in the glow discharge field wherein a pairof electrodes and a magnetic field are appropriately shaped and locatedrelative to each other to cooperatively define at least one completelyclosed plasma trap in a glow discharge system. Glow discharge systemsembodying the teachings of the present invention are also physicallycharacterized by axial symmetry imposed by the magnetic fieldconfiguration and/or the electrode structure. The invention uniquelyprovides a completely closed plasma trap in an r.f. glow dischargeenvironment.

In accordance with the present invention, an efficient glow discharge iscreated so that a minimum energy cost is paid per ion created. Inaddition, ions are created in a region located with respect to thetarget so that a very high fraction of the ions are used for sputtering.Furthermore, the plasma discharge is distributed over the target surfacein a controlled manner whereby a source of sputtered material havingdesired geometric distribution is provided. Hence, both uniform anddeliberately non-uniform sputtering characteristics are contemplated.

The present invention provides a plasma trap wherein the motion of theprimary electrons emitted from the cathode target is restricted bothradially and axially by a plasma trap, causing these primary electronsto remain near the target surface until the bulk of their energy hasbeen expended as useful work in ionizing collisions which generateadditional plasma. Complete containment by a trap is defined herein ascontaining substantially all, i.e., the vast majority, of the primaryelectrons which still have sufficient energy left to generate additionalions, i.e., the electrons which are not contained by the trap do nosubstantial ionizing work.

The plasma trap is achieved by a combination of electron reflection fromsurfaces at cathode potential, and electron deflection by a magneticfield, in a low gas pressure environment. Plasma is completely containedin the discharge system of the present invention by a trap which closesall six sides of the conventionally visualized rectilinear volume, fourof the six sides, as seen in a cross-section of the plasma trap, beingdefined by magnetic field lines and electrode surfaces, the remainingtwo sides being closed by the axial symmetry of the system. This axialsymmetry is provided by the magnetic field and/or the electrodestructure.

As primary electrons are ejected into the trap, their energy is used tomake additional ions in the plasma. When the primary electrons havegiven up essentially all of their useful energy in making ions, they areof no further value for ionization purposes, and they are then used formaintaining necessary current flow in the overall electrical system.This current flow is provided by electrons, ions, and a combination ofboth.

Briefly, in presently preferred exemplary embodiments of the invention,double electrode configurations are provided which yield high cathodecurrent densities at moderate to low voltages and at relatively lowambient gas pressures. In normal r.f. operation in the glow dischargesystem, each of the electrodes in the electrode pair can be anode andcathode with respect to each other, whereas it can be shown that bothelectrodes behave as cathodes with respect to the plasma throughout amajor fraction of the r.f. cycle. In this regard, for only very briefperiods of time on alternate half cycles, the electrodes become anodeswith respect to the plasma. However, the ions in the plasma and thecathode sheath essentially behave as though they were in a d.c. glowdischarge environment with both electrodes behaving as cathodes,essentially all of the time.

Three principle classes of electrode types are taught by the presentinvention wherein (a) plasma is generated on the outside of a pair ofpost type electrodes, (b) plasma is generated within a pair of hollowelectrodes and (c) plasma is generated adjacent the surface ofrelatively thin, planar or curved sheet-like electrodes. Allconfigurations utilize a cooperating magnetic field, using field coilseither external or internal to the particular electrode structure, themagnetic field being shaped to define with the particular electrodestructure at least one plasma containing trap having the aforementionedaxial symmetry imposed by the magnetic field and/or the electrodestructure. The shape and strength of the magnetic field can be adjustedto confine the plasma in the trap and eliminate end losses. The trap maybe defined by the pair of electrodes acting in concert with each otherand the magnetic field to define a single plasma trap. Alternatively,each electrode may cooperate with the magnetic field to define aseparate trap from the trap defined by the remaining electrode and amagnetic field. In addition, both types of traps may be usedsimultaneously in a hybrid situation wherein separate traps are definedby the magnetic field and each electrode, as well as a trap beingdefined by both electrodes in concert and the magnetic field.Furthermore, in accordance with the invention, it is contemplated that aplurality of plasma traps may be defined by each individual electrodeand the magnetic field.

Hence, the aforementioned electrode configurations essentially rely onthe simultaneous use of magnetic and electric trapping of high speedelectrons wherein the trap is formed as a consequence of theintersection of individual magnetic field lines with a cathode sheath atenough places to effectively close the trap on all sides. Suchconfigurations are extremely efficient in their operation, and byadjusting the magnetic field strength as current is varied, operationcan be achieved over a wide range of current values with little or nochange in required voltage.

For purposes of sputtering, the surface areas of the target electrodeare fabricated of the material to be sputtered (either made of thematerial or coated therewith) and an ambient gas with good sputteringcharacteristics, such as argon, neon or the like, is employed, or othergases may be used to cause reactive sputtering to occur.

Post type and hollow cathode configurations may utilize end wings orflanges in some configurations to aid in closing the plasma trap, or thewings may be dispensed with entirely if the trap boundaries can becompletely defined by the remaining electrode structure and the magneticfield. Where wings are used, they are made large enough to effectivelyclose the trap, or the magnetic field strength would have to beincreased to the point where the economical advantages of the systemmight be diminished. In this connection, wing size is directly relatedto the space required for the primary electrons to lose their usefulenergy in making additional ions.

The teachings of this invention may be considered as a method andapparatus for providing a plasma trap of such efficiency that thereplenishing requirements for sustaining a plasma within the trap areminimized to the point that the burden normally placed on the target asa cathode does not interfere in any substantial way with the sputteringprocess. Hence, the process of sustaining an intense plasma dischargeover the target surface is only very weakly coupled to the sputteringprocess itself. In this regard, making minor adjustments in the magneticfield strength is all that is required to facilitate a wide range ofsputtering voltages at a given working gas pressure and sputteringcurrent. Hence, the invention removes the requirement for any assistdischarge, second power supply, and other like disadvantages of priorart discharge systems affecting efficiency, yield, cost, complexity,etc.

Also contemplated in practicing the invention in its various embodimentsare unique means for mounting electrodes of insulating material, whereinO-rings are seated in grooves formed in metallic structures whereversealing abutment with the insulating electrode is desired, tosimultaneously mount, center and vacuum seal the electrode assemblies.In addition, novel cooling, assembling and electrical contactingstructural configurations are provided for various of the electrodestructures. Means are further provided, in accordance with theinvention, for protecting various structural elements in the glowdischarge system from undesired exposure to the plasma and avoidingconsequent deterioration, and preventing conductive plating ofinsulators which separate conductive electrodes, due to undesireddeposition of target material.

In addition, novel cage and shielding configurations are disclosed forthe entire glow discharge system to prevent undesired r.f. radiationleakage to the surrounding environment.

Glow discharge systems, in accordance with the invention, are useful forgenerating plasma for purposes such as causing cathodic sputtering toetch or clean the cathode material, causing cathodic sputtering for thepurpose of applying metallic or dielectric coatings to stationary ormoving surfaces placed near or within the generated plasma, and anyother application requiring the generation of a plasma or a flux ofsputtered material.

Accordingly, it is an object of the present invention to provide a newand improved glow discharge method.

Another object of this invention is to provide a new and improved glowdischarge apparatus.

A further object of this invention is to provide a new and improvedelectrode type glow discharge apparatus.

A further object of this invention is to provide a new and improvedmethod for generating a confined plasma.

Another object of this invention is to provide a new and improvedapparatus for generating a confined plasma.

Still another object of this invention is to provide a new and improvedr.f. glow discharge system.

Another object of this invention is to provide new and improved doubleelectrode configurations in a glow discharge system.

A further object of this invention is to provide new and improved glowdischarge systems embodying a variety of two electrode structuralconfigurations cooperating with a variety of magnetic fieldconfigurations to define traps for completely containing plasma.

Another object of this invention is to provide new and improved glowdischarge systems which will operate at low working gas pressures withrelatively low voltages.

A further object of this invention is to provide new and improvedsputtering apparatus which provide a considerable degree of uncouplingbetween the properties of the plasma discharge and the sputteringprocess.

Another object of this invention is to provide double electrode typer.f. sputtering devices in which substrates are not heated significantlyby the plasma, but in which the substrates can be heated if such heatingis desired.

A still further object of this invention is to provide new and improvedglow discharge systems which can be scaled to large sizes.

Another object of this invention is to provide new and improvedsputtering systems capable of providing substantially uniform depositionrates over a relatively large surface area.

Still another object of this invention is to provide new and improvedsputtering systems in configurations for providing uniform coatingaround the circumference of wire or rod-like shapes or a relativelyuniform coating over the surfaces of more complex shapes.

Another object of this invention is to provide new and improved doubleelectrode type r.f. sputtering systems in which both electrodes aretarget surfaces.

A further object of this invention is to provide new and improved meansfor mounting and centering sputtering targets fabricated of electricallyinsulating material.

An additional object of the present invention is to provide new andimproved means for cooling targets in a double electrode glow dischargesystem.

A still further object of this invention is to provide new and improvedmeans for assembling electrodes in a glow discharge system.

Still another object of the present invention is to provide new andimproved means for making electrical contact with various electrodestructures in a glow discharge system.

Another object of this invention is to provide new and improved meansfor protecting structural elements from undesired exposure to plasma.

A further object of this invention is to provide new and improved meansfor preventing conductive plating of insulators separating electricallyconductive electrodes.

Yet another object of this invention is to provide new and improvedshielding means to prevent undesired r.f. radiation leakage from an r.f.glow discharge system.

The above and other objects and advantages of this invention will becomeapparent from the following more detailed description, when taken inconjunction with the accompanying drawings of illustrative embodiments.

DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagrammatic elevational view of a double electrode posttype r.f. glow discharge system, in accordance with the invention,suitably mounted in an appropriate vacuum chamber with provisions formagnetic field coils;

FIGS. 2a through 2d illustrate embodiments of post type double electrodestructures with a variety of differing magnetic field configurationswhich may be used in practicing the invention;

FIGS. 3a through 3e illustrate several embodiments of double electrodestructural configurations which may be used in the practice of thepresent invention;

FIG. 4 is a diagrammatic elevational view, similar to FIG. 1, butillustrating the case where hollow cathode assemblies are utilized;

FIGS. 5a through 5c illustrate hollow cathode structures with variousmagnetic field configurations which may be used in accordance with theinvention;

FIGS. 6a through 6e illustrate several embodiments of hollow cathodeelectrode structures which may be used in practicing the presentinvention;

FIG. 7a illustrates one embodiment of a glow discharge apparatus, inaccordance with the invention, using double planar electrodes;

FIG. 7b is a bottom plan view of the electrodes and magnetic fieldwinding of the apparatus shown in FIG. 7a;

FIG. 7c shows another embodiment of a double planar electrode glowdischarge apparatus in accordance with the invention;

FIG. 7d is a bottom plan view of the electrodes and magnetic fieldwinding of the apparatus shown in FIG. 7c;

FIG. 8 is a longitudinal sectional view of a glow discharge device,constructed in accordance with the present invention, and utilizing posttype electrodes;

FIG. 8a is an enlarged, fragmentary sectional view of the area 8a inFIG. 8, and more clearly illustrates the manner in which the electrodesare connected together and shielding is provided for the insulatingmembers;

FIG. 9 is a longitudinal, sectional view of a glow discharge system, inaccordance with the invention, using hollow cathode electrodes of anelectrically insulating material;

FIGS. 9a and 9b are enlarged, fragmentary sectional views of the areas9a and 9b, respectively, in FIG. 9, showing in greater detail some ofthe mounting structure for the cathode electrodes;

FIG. 10 is a longitudinal, sectional view of a glow discharge system,constructed in accordance with the present invention, using hollowcathode electrodes of an electrically conductive material; and

FIG. 10a is an enlarged, fragmentary sectional view of the area 10a inFIG. 10.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Referring now to the drawings, wherein like reference numerals denotelike or corresponding parts, and particularly to FIG. 1 thereof, thereis shown a glow discharge apparatus constructed in accordance with thepresent invention and including a conventional vacuum chamber 11 havingmounted therein a double electrode type discharge device 12.

FIG. 1 primarily depicts a generalized physical arrangement forpost-type double electrode configurations which may take a wide varietyof forms and will be discussed in greater detail in connection withFIGS. 2a-2d and 3a-3e of the drawings.

The discharge device 12 includes a pair of "winged" or "flanged",coaxial electrodes 13, 14 mounted within the vacuum chamber 11 andsupported by means of a suitable mounting trunk 15. The electrodes 13and 14 are physically spaced apart and electrically isolated from eachother by means of a suitable insulator 16.

The electrode 13 includes an upper wing 13a, while the electrode 14includes a lower wing 14a, the wings being used either for mountingpurposes or to aid in closing the plasma trap. However, as willsubsequently become apparent, the electrodes 13 and 14 may cooperatewith the magnetic field in such a manner as to close the trapeffectively without the use of the end wings 13a, 14a, in which eventthe latter wings may be excluded from the structure.

The electrodes 13, 14 together define a cylindrical r.f. post cathodeassembly. An r.f. power supply 17, typically operating at a frequency of1.8 Mc., makes connections through a shielded transmission line 18extending through the mounting trunk 15 to the electrodes 13, 14.

A plurality of magnetic field coil windings 18 are disposed around andinsulated from the outer wall of an electrically conductive housing 11aof the vacuum chamber 11, and these field coils provide a uniformmagnetic field in the chamber, with field lines close to and extendingbetween the electrodes 13, 14, as indicated by the magnetic field lines19, where such a uniform field is desirable. However, some of the postconfigurations to be subsequently shown will require a magnetic fieldoriginating from a field winding within the electrodes themselves, andin those cases it may not be necessary to have magnetic fields generatedby external field coils such as the coils 18.

The vacuum chamber 11 has a suitable working gas contained within thechamber, such as argon, neon or the like at relatively low pressures,typically at 0.5-1.0 microns.

The mounting trunk 15 and transmission line 18 pass through anappropriate vacuum seal 20 at the top of the chamber 11. A suitableinsulator 21 electrically insulates the mounting trunk 15 from theelectrode 13 to prevent the mounting trunk from assuming cathodepotential and thereby becoming a sputtering target.

The lower end of the vacuum chamber 11 includes a conduit 22 which maybe coupled through any suitable valving to a vacuum pump (not shown) ina conventional manner. An electrically conductive screen 23 covers theopening in the electrically conductive housing 11a of the chamber 11through which the conduit 22 communicates with the chamber. In thisregard, the screen 23 and outer conductive housing 11a cooperate todefine an r.f. shield which is suitably connected to the center tapground (not shown) of the r.f. power supply so as to avoid circulatingground currents. In addition, the screen 23 shields the vacuum pump fromany discharge that might otherwise go down into the pump.

An end cap consisting essentially of an insulator 24 and shield 25, islocated outside the electrode assembly adjacent the wing 14a of theelectrode 14, to prevent sputtering from occurring on the end surfacesof the electrode. Such an end cap structure has been previouslydisclosed in the aforementioned application Ser. No. 178,240.

Appropriate coolant conduits (not shown) are also connected to thedischarge device 12 through the mounting trunk 15 for supplying suitablefluid coolants, such as water and the like.

A substrate 26 is shown disposed within the vacuum chamber 11 to allowsputtering of a coating or plating from each of the electrodes 13, 14which are the cathode targets of the system. The substrate 26 may bepositioned in any convenient location between the electrodes 13, 14 andthe sidewall of the chamber 11, the substrate being supported in anysuitable manner. Port holes (not shown) or other covered openings can beprovided in the outer wall of the vacuum chamber 11 to allow access tothe interior of the chamber for observation, insertion, positioning andremoval of the substrate 26.

Referring now to FIGS. 2a-2d, post type double electrode structures areshown in various embodiments, each of which includes a conical electrode13 coaxial with a conical electrode 14, with their frustum ends adjacentto one another and separated only by the insulator 16, for electricalisolation purposes, all as substantially shown in FIG. 1. However, eachof FIGS. 2a-2d shows a different magnetic field configuration so thatthe plasma traps are defined differently in each case.

As previously indicated, the end wings 13a, 14a shown associated withthe electrodes 13, 14 may be included for mounting purposes or to aid indefining the plasma trap. If they are not needed for either of thesepurposes, the end wings need not be included. The inclusion of these endwings, however, enables the angle of the conical surfaces defining theelectrodes 13, 14 to be selectively tailored so that the sputteredmaterial is ejected in selected directions.

Where the end wings 13a, 14a are used to aid in defining the boundariesof the plasma trap, they are made large enough to effectively close thetrap or the magnetic field strength would have to be increased unduly.In this connection, wing size is directly related to the space requiredfor the primary electrons to lose their useful energy in makingadditional ions.

In FIG. 2a, the magnetic field lines 19 run parallel to the axis ofsymmetry of the conical electrodes 13, 14 so that they intercept one ofthe electrodes 13, 14 on each side and, hence, define a single plasmatrap utilizing both of the electrodes 13, 14 acting in concert. Whetheror not the wings 13a and 14a aid in defining the trap depends upon thestrength of the magnetic field and the radial distance from the axis ofsymmetry required to completely contain substantially all of the primaryelectrons capable of doing additional ionization work. The magneticfield shown in FIG. 2a is typically generated by magnetic field coils,such as the coils 18 in FIG. 1, wound about the outside of the vacuumchamber.

FIG. 2b shows a similar electrode configuration as FIG. 2a, but with twosets of magnetic field coils 28, 29 provided inside the electrodes 13,14, respectively, and generating a curved magnetic field terminating oneach of the electrodes. Hence, the embodiment of FIG. 2b also defines asingle plasma trap with the electrodes 13, 14 acting in concert to closethe trap.

In FIG. 2c, we again have a pair of field coils 30, 31, with one fieldcoil being inside each of the electrodes 13, 14. However, in theembodiment of FIG. 2c, the magnetic field generated by each field coilbegins and terminates on the same electrode, so that two separate plasmatraps are defined. Each plasma trap is defined by the magnetic field 19and only one electrode, although some small electron current existsbetween the two traps for electrical circuit continuity.

FIG. 2d is similar to the embodiment shown in FIG. 2c, utilizing twofield coils 32, 33 within the electrodes 13, 14, respectively. However,in the embodiment of FIG. 2d, a scalloped magnetic field is definedwhich provides a plurality of separate plasma traps in connection witheach individual electrode.

Although not specifically shown in the drawings, hybrid magnetictrapping configurations are feasible and may be provided by acombination of field shapes such as the magnetic field shown in FIG. 2bwith that shown in either FIG. 2c or FIG. 2d. Such hybrid configurationswould provide a plurality of traps defined by individual electrodes andthe magnetic field, together with an additional plasma trap defined bythe magnetic field and both of the electrodes acting in concert.

It will also be appreciated that, while the magnetic field in theembodiments of FIGS. 2b-2d has been described as generated by internalmagnetic field coils, such magnetic fields could also be generated usingpermanent magnets.

FIGS. 3a-3e illustrate various double electrode post configurationswhich are suitable for use with any of the magnetic field configurationsshown in FIGS. 2a-2d to define plasma traps in a glow discharge systemfollowing the teachings of the present invention.

FIG. 3a shows a pair of coaxial conical electrodes 13, 14 which includeinside wings 13b, 14b, as well as outer end wings 13a, 14a,respectively. The angles of the inside flanges 13b, 14b with respect tothe cone faces is not critical. Making the inner wings shorter than theouter wings facilitates use in the hybrid magnetic field mode previouslydiscussed.

FIG. 3b illustrates a pair of straight cylindrical coaxial electrodes13, 14 with no inner wings, while FIG. 3c illustrates the sameconfiguration including inner wings 13b, 14b for each of the electrodes13, 14, respectively. Again, the size of the inner wings determines howreadily the electrode configuration can be operated in a hybrid modewherein traps are defined by the magnetic field and each electrodeseparately, as well as with both of the electrodes acting in concert.

FIG. 3d shows a pair of coaxial electrodes 13, 14 with a complex curvefor the outer electrode surface, but still having axial symmetry. Theelectrode surface is shaped in accordance with a desired geometricconfiguration for the sputtering pattern from the electrodes. Theelectrodes 13, 14 may include outer or inner wings depending upon thedesired sputtering geometry.

In the embodiment of FIG. 3e, a pair of electrodes 13, 14, in the formof a pair of split cylinders, are separated by an insulator 16. Whilethe double electrode configuration of FIG. 3e is preferably used with astraight magnetic field, such as that shown in FIG. 2a, any of themagnetic field configurations previously discussed may be used with thiselectrode configuration, the axial symmetry being imposed by themagnetic field as opposed to the electrodes.

In all of the glow discharge electrode and magnetic field configurationsdisclosed in accordance with the invention, the plasma traps arecharacterized by axial symmetry about an axis of rotation, the symmetrybeing imposed by the magnetic field, the electrodes or both the magneticfield and the electrodes.

Referring now to FIG. 4, there is shown a diagrammatic view similar toFIG. 1, but illustrating the case where hollow electrode assemblies areutilized to generate an internal plasma. A pair of hollow, conical,coaxial electrodes 113, 114 are appropriately supported within an outerelectrically conductive cylindrical housing 115. The housing 115 isterminated at both ends by end shields 116, 117 having ports 116a, 117a,respectively, through which a vacuum may be pumped. The ports 116a, 117aare covered by electrically conductive screens 118, 119. The electrodes113, 114 are separated by a suitable electrical insulator 119, and r.f.power is delivered via a shielded transmission line 120 from a suitablepower supply 121 to each of the electrodes 113, 114 at electricalconnection points 122, 123, respectively.

The grounded power supply 121, shielded transmission line 120,cylindrical housing 115, end shields 116, 117 and screens 118, 119together constitute a Faraday type r.f. shield similar to that providedby the vacuum chamber and screens in the embodiment of FIG. 1.

Communication with the vacuum pumps is made via any appropriate conduit124 and, preferably, the conduit 124 is separately grounded and isolatedfrom the end shield 117 by an insulating member 125. A similarinsulating member 126 is located on the opposite side of the system forconnection to an end cap, another stage of glow discharge apparatus, ora feeding station for a suitable substrate, such as the wire or rod-likesubstrate 130 along the central axis of the electrodes 113, 114.

An electrical insulator 127 extends between the electrode 113 and theend plate 116, and a like electrical insulator 128 extends between theelectrode 114 and the end plate 117, to isolate the electrodes from theelectrically conductive r.f. shield.

A plurality of magnetic field coils 129, similar to the field coils 18in FIG. 1, are wound about the exterior of the cylindrical housing 115to provide the plasma confining magnetic field configuration whichcooperates with the electrodes 113, 114. In this regard, where hollowcathode systems are used, the magnetic field configurations are alwayssupplied by external field coils.

FIGS. 5a-5c illustrate various magnetic field configurations which maybe used with hollow cathode electrode configurations. It will beappreciated that, while conical electrode assemblies are shown in all ofin the embodiments of FIGS. 5a-5c, this is by way of example only, andother hollow electrode configurations may be used with the magneticfield configurations shown. In addition, while an insulator 119 is shownseparating the electrodes 113, 114, the latter insulator may be excludedif the electrodes themselves are of an electrically insulating material,as where the target material being sputtered is a dielectric.

In FIG. 5a, all of the magnetic field lines 131 traverse from theelectrode 113 to the electrode 114, so that a plasma trap is defined bythe magnetic field and both of the electrodes acting in concert. Hence,FIG. 5a illustrates the hollow electrode counterpart of the postconfigurations shown in FIGS. 2a and 2b.

FIG. 5b illustrates the case where the magnetic field lines exit andenter at two locations on the same electrode, so that separate plasmatraps are defined by the magnetic field and each individual electrode.FIG. 5b thus is the hollow electrode counterpart of the configurationshown in FIG. 2c for post type electrodes.

Similarly, FIG. 5c illustrates a scalloped magnetic field configurationwherein a plurality of separate traps is defined by the magnetic fieldand each of the electrodes. Thus, FIG. 5c is analogus to the magneticfield configuration previously discussed in connection with FIG. 2d,FIG. 5c dealing with the hollow electrode case.

FIGS. 6a-6e illustrate various embodiments of double electrode hollowcathode configurations which may be used with any of the magnetic fieldconfigurations shown in FIGS. 5a-5c, including the hybrid situationwherein the magnetic field shown in FIG. 5a may be used in combinationwith the magnetic field configurations shown in FIG. 5b or 5c.

FIG. 6a shows a pair of hollow, coaxial cylindrical electrodes 113, 114,separated by an electrical insulator 119 if needed. If the magneticfield configuration of FIG. 5a is used, either alone or together withthe magnetic field configurations of FIGS. 5b and 5c, it is desirable toinclude outer end wings 113a, 114a for the electrodes 113, 114,respectively in order to close the plasma trap. Otherwise, the end wingsneed not be included where the magnetic field combines with eachelectrode separately to define plasma traps.

FIG. 6b is similar to FIG. 6a, but with the additin of internal endwings 113b, 114b to the electrodes 113, 114, respectively, the innerwings being shorter than the outer end wings 113a, 114a, to enablehybrid plasma trap operation if desired.

FIG. 6c illustrates a pair of coaxial, conical electrodes 113, 114 withinner end wings 113b, 114b, respectively, the latter configuration beingcapable of utilizing any of the previously discussed magnetic fieldconfigurations for hollow cathode electrodes.

FIG. 6d is similar to FIG. 6c but with a generalized, complex shape forthe inner cylindrical surface of the electrodes 113, 114, so that thegeometry of the sputtering pattern can be varied to meet anyrequirements.

FIG. 6e illustrates a pair of hollow cathode electrodes comprising acylinder split along its longitudinal axis and having an insulator 119between the two half cylinders if the electrodes are of an electricallyconducting material. Again, the electrode configurtion of FIG. 6e may beused with any of the previously discussed magnetic field configurations,the axis of symmetry of the resulting plasma trap configurations beingdetermined by the magnetic field rather than by any symmetry of theelectrode structure.

Having described various types of double electrode configurations, ofthe post type and the hollow electrode type, in combination with variousmagnetic field configurations, to define a wide variety of differentlyconfigured traps for the containment of plasma in a glow dischargesystem, a discussion of the manner in which these traps function is nowpresented.

In all of the two electrode r.f. glow discharge devices described inconnection with the present invention, both electrodes are sputteringtargets. The glow discharge device is operated at a combination ofpressure and frequency such that essentially all of the energytransferred between the r.f. electric field and the charged plasmaparticles occurs in the electrode cathode sheath region. The operationof such an r.f. discharge apparatus is analogous to that of a d.c.discharge device with each electrode behaving as a d.c. cathodethroughout the major portion of the r.f. voltage cycle. An avergepotential drop approximately equal to the zero to peak applied r.f.potential, less the voltage drop across the dielectric sputteringtargets, exists in the cathode sheath over each of the targetelectrodes. Ions of the working gas drift from the plasma volume intothe cathode sheath where they fall through the sheath potential as theyare accelerated in the directin of the cathode target surface. As thesebombarding ions impact on the cathode surface, they sputter atoms of thetarget material and also cause secondary electrons to be released fromthe cathode surface. These electrons are accelerated in the cathodesheath to essentially the entire sheath potential, where they enter theplasma volume as primary electrons and produce new ions by electron-atomcollisional processes. A fraction of the ions produced in the plasmavolume by these primary electrons, and their secondaries, eventuallymake their way to the edge of the cathode sheath, where they enter thesheath, bombard the cathode target surface, and so repeat the process.In this way, the cathode processes permit the discharge to sustainitself.

In such a d.c. or r.f. glow discharge device, the operating voltage maybe considered as an index of the discharge efficiency. Whereelectrically insulating targets are used, in the r.f. case, theoperating voltage referred to is the zero to peak operating voltageacross the glow discharge, as opposed to the total voltage across thedischarge device which would include the voltage drop across thedielectric sputtering targets.

The combination of electrode pairs and a suitably shaped magnetic fieldin a system having axially symmetry is used to provide a trap for theprimary electrons which restricts their motions both radially andaxially, thereby causing them to remain near the target surfaces until alarge fraction of their energy has been expended in ionizing collisions.Thus, the ions are produced adjacent the target surface, i.e., theplasma created by the trapped electrons essentially defines an annulusabout an axis or rotation which surrounds, and is in intimate contactwith, the electrodes constituting the targets.

The plasma trap is achieved by a combination of electron reflectionsfrom surfaces at cathode potential and electron deflections by themagnetic field. The closed plasma trap is thus formed on some sides bythe magnetic field and on the remaining sides by the cathode surfaces,so that end losses are completely precluded.

In referring to the closure of the plasma trap on all sides it will beappreciated that a real rectangular volume in the plasma has six sides,wherein two of the sides of the trap are closed by axial symmetry, sothat only four sided cross-sectional configurations viewed perpendicularto the axis of symmetry need be considered.

In the r.f. double electrode configuration, the pair of electrode aredriven by two r.f. feed lines. Since the electrode pair is driven byalternating voltage, the electrodes are alternately anode and cathodewith respect to each other. Referring to the two electrodes as A and B,respectively, electrode A is at times a cathode with respect toelectrode B and at other times an anode with respect to electrode B. Ingeneral, both electrodes are biased negatively with respect to theplasma throughout a major portion of the r.f. cycle, i.e., electrodes Aand B both behave as cathodes with respect to the plasma. For only verybrief periods of time, on alternate half cycles of the r.f. potential,electrodes A and B become anodes with respect to the plasma.

With the foregoing description in mind, r.f. plasma traps can be dividedinto two categories. In the first category, the two electrodes A and Boperate in concert to provide a partial closure of the trap, with themagnetic field completing trap closure. In such a case, magnetic fieldlines eminate from electrode A and enter electrode B. In this instance,there is relatively free electron motion along the field lines fromelectrode A to electrode B while the cathode sheath at the twoelectrodes forms reflecting surfaces for electron motion. Hence, takinga cross-sectin through the system on a plane containing the axis ofsymmetry, two sides of the plasma trap are closed by the magnetic fieldlines, another side is closed by electrode A, and the last side isclosed by electrode B.

In a second case, the electrodes A and B do not operate in concert, butrather completely independent of each other, and in this case themagnetic field is used to complete separated traps, one trap adjacentelectrode A and the second trap adjacent electrode B. An example iswhere the magnetic field lines originate from electrode A, bend and thenre-enter electrode A. Again, taking a cross-sectional view on a planecontaining the axis of symmetry, a trap is formed adjacent to electrodeA wherein one side of the plasma trap is closed by the cathode sheath atelectrode A and the remaining three sides of the trap are closed by themagnetic field at electrode A. A similar separate trap is found atelectrode B and is formed by the cathode sheath at electrode B and themagnetic field.

In a third case, which is the hybrid situation, suitable manipulation ofcurrents in the magnetic field producing coils can provide magneticfield lines wherein some of the field lines pass from electrode A toelectrode B while other field lines eminate from electrode A and returnto electrode A, the situation being duplicated at electrode B, so thatboth types of plasma traps, separate and bridging between electrodes,exist simultaneously.

As previously indicated, the pair of electrodes in an r.f. systemalternate as cathode and anode with respect to each other, whereas bothelectrodes are generally negatively biased with respect to the plasmathroughout most of the r.f. cycle. For the case where the magnetic fieldis so arranged that the two electrodes A and B previously referred tooperate in concert with each other, to define a single plasma trap, themanner in which the trap functions to maintain the desired plasmadensity is now described.

For illustrative purposes, consider an instant of time at whichelectrode A is a cathode with respect to electrode B. Since bothelectrodes are cathodes with respect to the plasma, both will receiveion bombardment which causes the release of electrons from theseelectrodes in a manner governed by a secondary emission coefficientγ_(i). The electrons emitted by electrode B will be accelerated by thecathode sheath around electrode B and will move away from the latterelectrode generally along the magnetic field lines. Accordingly, sincethe magnetic field lines extend from electrode B to electrode A in thepostulated configuration, these emitted electrons will move to electrodeA. However, since electrode A is a cathode with respect to electrode B,the electrons will be reflected by the cathode sheath at electrode A andwill return to electrode B where they are again reflected by cathodesheath at electrode B. The net result is that the electrons emitted byelectrode B are trapped by electrode A and electrode B.

Now consider electrons emitted by electrode A, as opposed to theprevious situation for electrons emitted from electrode B, electrode Ahaving been indicated as being at a more negative potential thanelectrode B, i.e., electrode A is a cathode with respect to electrode B.These electrons will be accelerated by the cathode sheath aroundelectrode A and will move away from electrode A along the magnetic fieldlines to ultimately arrive at electrode B. Since the gas pressure in thedischarge system is low, these latter electrons will have lost little orno energy when they arrive in the vicinity of electrode B and they willhave enough energy to penetrate the cathode sheath at electrode B sothat they actually crash into electrode B. This results in removal ofelectrons from the trap. However, secondary electrons may be emittedfrom electrode B as a result of the crash. This emission due to electronbombardment, as opposed to bombardment by gas ions, is governed by asecondary emission coefficient γ_(e).

In light of the foregoing explanation, it will be apparent that theelectron emission from electrode B is augmented by the removal from thetrap of electrons which originally were emitted at electrode A. Hence,while the electrons from electrode A are trapped for only a very shortperiod of time, these electrons give rise to enhanced electron emissionfrom electrode B, and the latter electron emission is effectivelytrapped. It will be apparent, therefore, that the plasma density of anr.f. device wherein both electrodes are operating in concert to define aplasma trap, is determined by two secondary emission coefficients,namely γ_(i) and γ_(e).

By similar analysis, it can be shown that, if the magnetic field isshaped so that the two r.f. electrodes do not operate in concert, butrather define separate traps with the magnetic field, then the plasmadensity is determined primarily by only the single coefficient γ_(i),secondary emission being induced primarily by ion bombardment withminimal contribution due to electron bombardment.

Referring now more particularly to FIG. 7a through FIG. 7d of thedrawings, there are shown two embodiments of r.f. glow discharge systemsutilizing pairs of planar electrodes 213, 214 to maintain the dischargeand cooperate with the magnetic field to define plasma containing traps.The primary distinction between the embodiment shown in FIGS. 7a and 7b,and the embodiment shown in FIGS. 7c and 7d, resides in the electrodeshape and the type of plasma traps defined.

FIGS. 7a and 7b show the electrodes 213, 214 as being semicircular orD-shaped electrodes which together define a circle split along adiameter. In FIGS. 7a and 7b, a toroidal coil 215, having its axis ofrotation perpendicular to the plane of the electrodes 213, 214, andlocated on the opposite side of the electrodes from the target surfacesfacing a plurality of substrates 220, defines a toroidal magnetic fieldwhich cooperates with each of the electrodes to define a hybrid plasmacontaining trap. The magnetic coil 215 is separated from the electrodes213, 214 by an appropriate electrical insulator 216. Electrical power issupplied to each of the electrodes 213, 214 by a suitable r.f. powersupply 217, over shielded buses 218, 219, respectively.

As previously indicated, the primary difference in the embodiment of theinvention as shown in FIGS. 7c and 7d from that shown in FIGS. 7a and 7bresides in the shape of the electrodes 213, 214. In FIGS. 7c and 7d, theelectrodes 213, 214 are in the form of concentric discs spaced from eachother, electrode 213 constituting an outer ring electrode with theelectrode 214 constituting an inner solid circular disc. In addition,the toroidal magnetic coil winding 215 defines a magnetic field in FIGS.7c wherein both electrodes 213, 214 act in concert with each other andthe magnetic field to define a plasma trap.

The axis of symmetry for the plasma traps in the embodiment show in FIG.7a through 7d is the axis of revolution for the toroidal magnetic field.

In addition, while circular, planar configurations have been shown forthe electrodes in the embodiments of FIGS. 7a-7b, the electrodes couldbe curved, sheet-like electrodes rather than planar electrodes, andcould be in shapes other than circular.

Glow discharge systems of the general type disclosed in FIGS. 7a through7d of the drawings may be mounted in any appropriate closed chamberenvironment such as that shown in FIG. 1 for post type electrodeassemblies, and with appropriate trunks like the trunk 15.

FIGS. 8, 9 and 10 of the drawings show several, more detailedembodiments of double electrode glow discharge systems, in accordancewith the invention, in specific mounting chamber configurations.

Referring now to FIGS. 8 and 8a, there is shown a conventional vacuumchamber 300 fabricated from a non-magnetic material, such as stainlesssteel or aluminum, and provided with a port 301 through which anappropriate substrate 302 may be admitted for purposes of sputtercoating. A post type, cylindrical, double electrode discharge device303, constructed in accordance with the present invention, is mountedwithin the chamber 300. A pair of magnetic field coils 304, 305, ispositioned around the outside of the vacuum chamber, in essentially aHelmholtz configuration, the common axis of the pair of coils beingcoincident with the cylindrical axis of the vacuum chamber and thedischarge device 303. The coils 304, 305 provide a substantially uniformmagnetic field in the central region of the vacuum chamber 300.

The discharge device 303 includes a pair of coaxial, conical electrodes306, 307 having confronting frustum faces 306a, 307a, respectively, andend wings or flanges 306b, 307b at the cone bases remote from eachother.

As best observed in FIG. 8a, the electrodes 306, 307 are separated by aninsulating ring 308, of glass, pyrex, ceramic, quartz or other suitablematerial, so that the frustum face 306a and 307a do not contact eachother. This is particularly significant where the electrodes arefabricated of an electrically conductive material.

Electrodes 306, 307 are typically fabricated from the metal to besputtered or, from an easy to machine metal such as aluminum or thelike, with a thick coating (not shown) of the metal or ceramic to besputterd. Such thick coatings can, for example, be applied with adequateadhesion by well known techniques of plasma spraying.

R.F. electrical power is delivered from a suitable power supply (notshown) to the electrodes 306, 307 by a coaxial transmission line 309having a central conductor 309a and an outer conductor 309b, the centralconductor being physically and electrically connected to the electrode306 and the outer conductor being connected to the electrode 307. Inthis regard, the central conductor 309a passes through a clearanceaperture 307c in the frustum face 307a of electrode 307, and intothreaded engagement with the frustum end 306a of the electrode 306 viaan internally threaded boss 306c formed in the latter electrode.

The two electrodes 306, 307 are cooled by any appropriate fluid coolant,such as water, flowing in a cooling chamber 311 formed in the interiorof electrode 306 and by a cooling chamber 312 similarly formed inelectrode 307. The coolant is delivered to the cooling chamber 311 bymeans of a hollow conduit 313 which, together with a mounting flange 314secured to the end wing 306b of the electrode 306, also serves as amechanical support for the discharge device 303. A similar conduit 315and its associated mounting flange 316 provide a path for coolant to thechamber 312 in the electrode 307 and also provide a mechanical supportfor the end of the discharge device 303 opposite that supported by theconduit 313.

Coolant flow passes in and out of the conduit 313 and chamber 311through conventional fittings 317, 318 and, likewise, in and out ofconduit 315 and chamber 312 via appropriate fittings 319, 320. Internalconduits 322 and 323 carry the entering coolant directly from thefittings 317, 319, respectively, to the areas of the respectiveelectrodes which are subject to the greatest heating.

An insulating coating (not shown) on the outer surfaces of the conduits313, 315, in combination with the magnetic field and a pair of outerconcentric floating shields 325, 326, respectively, prevent the plasmadischarge from forming over the coolant conduits and causing sputteringfrom the conduits.

The shields 325, 326 are in the form of cylindrical sleeves extendingfrom ground shield support plates 327, 328, respectively, one plate ateach end of the vacuum chamber 300. The electrode and coolant conduitassemblies are electrically insulated from the floating shield supports327, 328 by suitable insulator rings 329, 330, respectively. Similarly,the floating shield supports 327, 328 are insulated from the vacuumchamber 300 by a pair of insulator rings 331, 332, respectively.

The discharge device 303 is held together by the central conductor 309awhich also serves as a compressioning member, both ends of the centralconductor being threaded. The conductor 309a is typically fabricatedfrom a high strength material such as stainless steel with a coppercoating having a thickness equal to several times the skin depth for theoperating frequency (typically in the range of 1 mc to 10 mc).

As previously indicated, one end of the central conductor 309a engagesthe boss 306c of the electrodes 306. A nut 333 threads onto the oppositeend of the conductor 309a, thereby transmitting a compressive forcethrough an insulator ring 334 fabricated from a ceramic or high strengthplastic material, and onto the outer conductor 309b, thereby placing thecentral conductor in tension. This latter tension causes a pair ofO-rings 335, 336, seated in grooves in the frustum faces 306a and 307a,respectively, and in abuttment with opposite sides of the insulator ring308, to be compressed about the center insulator so as to form a vacuumseal.

Additional O-ring seals 337, 338, the seal 337 being located between theelectrode wing 306b and the conduit flange 314, with the seal 338 beinglocated between the electrode wing 307b and the conduit flange 316,vacuum seal these abutting surfaces. Additional O-rings 339 through 347on opposite sides of the insulator rings 329, 330, 331, 332, and at thejunction between the conduit 315 and the end mounting plate 348 for thefittings 319, 320, complete the vacuum seal in the system.

In addition, an O-ring 349, trapped between the outer conductor 309b andthe inside face defining the coolant chamber 312 of the electrode 307,and another O-ring 350 between the outer conductor and the central boreof the end plate 348, provide water seals and permit the coaxialtransmission line 309 to be maintained in air at atmospheric pressuresso as to minimize the problem of electrical breakdown and arcing.

A conventional, sliding vacuum seal 351, seals off the coolant chamber311 and its associated exit and entry channels to provide theflexibility required when adjustments are made in the tension applied tothe central conductor 309b.

As best observed in FIG. 3a, a pair of overlapping and spaced apartbaffle lips 352, 353, in the form of concentric cylinders withoverlapping ends, extend from the frustum faces 306a, 307a of theelectrodes 306, 307, respectively, outside the insulator ring 308, sothat the ring is effectively surrounded by the lips. In this way, theinsulator ring 308 is shielded from the plasma and metallic sputteredmaterial, thus preventing an electrically conductive coating from beingformed over the surface of the insulator ring which would cause the twoelectrodes to become electrically short-circuited together.

The substrates 302 are conveniently located around the inside wall ofthe vacuum chamber 300, in the path of sputtered material from thetarget electrodes 306, 307.

In operation, the conical electrode surfaces in FIG. 8 intersectmagnetic field lines to form the plasma trap shown as a shaded region inFIG. 8. Electrons formed by ion bombardment and the like on the conicalelectrode surfaces are accelerated in the sheaths surrounding theelectrodes and enter the plasma trap carrying the energy they gained inthe sheaths. Within the trap, these electrons move freely along themagnetic field lines, but can only cross the field lines via collisionalassisted diffusion. The electrons move back and forth along the magneticfield lines, reflecting first off one electrode and then the other,while using their energy to make ions by collisions with the working gasatoms in their paths. These electrons will continue this motion untilthey happen to be incident on one of the electrodes at a time in itsr.f. electrical cycle when it is serving as an anode, or they diffuseregularly out of the trap via collisional processes. In this latterregard, the radial trap depth is made large enough so that the averageelectron has given up all of its useful energy by the time it hasdiffused across the depth of the trap, i.e., it leaves the trap with anenergy less than the first ionization potential for the working gas inquestion (e.g., 15.75 ev for argon).

The floating shields, 325, 326 are loss surfaces for those few electronsor ions which should happen to escape the trap. Charged particles losseson these surfaces discourage the formation of plasma over the surfacesof the coolant conduits 313, 315, which are of the r.f. potential of thetarget electrode surfaces.

Referring now more particularly to FIGS. 9, 9a and 9b of the drawing, anembodiment of the invention is illustrated utilizing a hollow cathodedischarge device 400 for coating rod and wire-like shapes, or the convexsurfaces of more complete articles, with an electrically insulatingcoating. The discharge device 400 consists primarily of two coaxial,hollow conical electrodes 401, 402 which are mounted with their basesfacing one another in a substantially uniform magnetic field formed by aplurality of magnetic field coils 403 which surround the overallassembly and are appropriately insulated therefrom.

A pair of conical electrode surfaces 401a, 402a are thus arranged sothat the magnetic field lines from the coils 403 cut the electrodesurfaces in such a way as to form an annular, plasma containing trap. Asin previously discussed configurations, the trap causes large numbers ofions of the working gas to be formed in the vicinity of the targetelectrode surfaces, thereby contributing to enhanced efficiency of thesputtering process.

The conical electrodes 401, 402 consists essentially of ceramic conicalsections which are formed from the insulating material to be sputtered.The conical electrodes 401, 402 are surrounded and captured by outercylindrical fluid coolant jackets 404, 405, respectively.

The manner in which the overall assembly is held together is nextdescribed. As best observed in FIG. 9a, a pair of cooling jacket flanges406, 407, one at each of the confronting ends of the jackets 404, 405,respectively, enable the jackets to be bolted together by a plurality ofelectrically insulating bolts 408, of nylon or the like. The electrodes401, 402 and jackets 404, 405 are held apart by a spacer ring 409, ofaluminum or other easily machined material, formed with suitable O-ringgrooves 410, 411 on opposite faces of the ring. The latter spacer ring409 is captured between confronting polished, outwardly extendingflanges 412, 413 of the electrodes 401, 402, respectively, henceproviding, with O-rings seated in the appropriate grooves, a vacuumseal. The purpose of the spacer ring 409 is to provide the O-ringgrooves 410, 411 so that such grooves do not have to be machined intothe ceramic conical sections defining the electrodes. Similarly, O-ringgrooves 414, 415 are machined in the cooling jackets 404, 405,respectively and are located opposite a polished face on the side of theconical section flanges 412, 413 opposite that in contact with the ring409, thus capturing suitable O-rings therebetween and forming a waterseal.

Another water seal is formed by a pair of electrode retainer rings 416,417 which bolt onto the opposite remote ends of the cooling jackets 404,405, respectively. As best observed in FIGS. 9 and 9b, the inner face ofeach retaining ring is chamfered to define a portion of a triangularO-ring groove, the groove 419 being partially provided by the retainerring 417, with the corresponding groove 418 being partially provided bythe retainer ring 416. The complete triangular sealing grooves 418, 419are defined by the chamfered faces of the retaining rings 416, 417 asthey abut inwardly directed cooling jacket flanges 404a, 405a,respectively.

As best observed in FIGS. 9 and 9b, in addition to providing a waterseal, the O-ring grooves 418, 419 and their associated O-rings assist incentering the ceramic conical sections which define the electrodes 401,402 within the water jackets 404, 405, respectively.

Suitable coolant conduits 420, 421 circulate coolant into and out of thecooling jacket 404. These conduits, and similar coolant conduits 422,423 for the cooling jacket 405, may be fabricated of plastic pipe or thelike.

The two electrode assembly is driven by a balanced r.f. input with acenter ground. A pair of r.f. power lines 424, 425 are appropriatelyconnected to the cooling jacket flanges 406, 407, respectively.

A pair of electrically conductive screens 428a, 428b, of stainless steelor the like, are provided in the form of perforated sheets installed onthe inside of the water jackets 404, 405, respectively, adjacent to, butspaced from, the ceramic conical sections defining electrodes 401, 402.These screens 428a, 428b cause a uniform r.f. potential to be applied tothe outer surface of the ceramic electrodes 401, 402 and thus promotethe occurrence of uniform sputtering over the inner target surfaces ofthese electrodes. The spaces between the screens 428a, 428b and theirrespective electrodes 401, 402 serves to improve cooling efficiency andminimize hot spots.

The electrode assembly is capped at each end with electricallyconducting shield plates 429, 430 which are attached to the coolingjackets 404, 405, respectively, by electrically insulating plastictoggles 431, the shield plates being spaced from the electrodes 401, 402by electrically insulating spacers 432, 433, respectively. O-rings 434provide vacuum seals between the electrode assemblies and the latterspacers, while O-rings 435 provide vacuum seals between the spacers andthe shield plates. The shield plates 429, 430 which are electricallygrounded, serve to shield the vacuum system per se, i.e., the pumps,gages, and the like, from the r.f. plasma discharge that is trappedbetween the conical electrode sections.

The central portions of the shield plates include ports to permit thedischarge cavity to be evacuated and to permit filling of the cavitywith the working gas chosen. Hence, the central portions may be providedwith an electrically conductive screen 436, as shown on the shield plate429, or may incorporate a wire die 437 and associated surrounding screen438 as shown on the shield plate 430.

The wire die arrangement is used when coating wire substrates to assistin positioning the wire at a desired location within the electrodeassembly. When coating more complex substrates, a suitable stinger (notshown), with the substrates mounted on the stinger, can be positioned inthe discharge cavity from one end. A partial screen may then be insertedto fill the annular region between the stinger and the wall of theassembly in substantially the same manner as the screen 438 fills theregion around the die 437 located in the shield plate 430.

An outer cylindrical shield 439, in the form of an electricallyconductive sleeve, connects the two shield plates 429, 430 togetherelectrically and encapsulates the entire glow discharge assembly. Asimilar ground shield 440 surrounds the r.f. power lines 424, 425 and isphysically and electrically connected to the cylindrical shield 439.Hence, the entire discharge device is located within a Faraday typeshielded cavity which keeps stray r.f. radiations from escaping to thesurrounding environment.

The magnetic field coils 403 are axially spaced along and electricallyinsulated from the outside surface of the ground shield 439 in asolenoidal coil configuration which produces a substantially uniformmagnetic field within the discharge cavity. A plurality of spacers 441,of plastic or the like, are located between the ground shield 439 andthe cooling jackets 404, 405 to assist in supporting the weight of themagnetic field coils. The spacing between the ground shield 439 and thecooling jackets 404, 405 is made large enough so that the electricalcapacity between them is relatively small. In this way a large impedanceexists between the electrodes 401, 402 and electrical ground, and,therefore, an efficient r.f. power transfer to the plasma discharge isassured.

The entire assembly shown in FIG. 9 is connected at one end to asuitable vacuum and gas feed system (not shown). The vacuum system mayincorporate suitable pass-throughs, well known in the art, so that wire,rod, strip or other elongated substrates can continually be passedthrough the discharge cavity for purposes of receiving a sputteredcoating.

Referring now to FIGS. 10 and 10a of the drawings, there is shown anembodiment of the invention in the form of a hollow cathode dischargedevice 500 for coating rod and wire-like shapes, or the convex surfacesof more complex articles, with either insulating or conducting coatings.The discharge device 500 includes two coaxial, hollow, conicalelectrodes 501, 502 which are mounted facing one another in asubstantially uniform magnetic field formed by a plurality of magneticfield coils 503 which surround the assembly. The inner target surfacesof the pair of conical electrodes 501, 502 cooperate with the magneticfield lines to form an annular plasma trap which functions substantiallyin the same manner as for the embodiment shown in FIG. 9. In thisconnection, the discharge device 500 of FIG. 10 differs from thedischarge device 400 of FIG. 9 primarily in that shielding againstplasma and sputtered material is provided for an electrically insulatingring 545 separating the cooling jackets and electrodes, since sputteringwith an electrically conducting material is contemplated by theembodiment of FIG. 10. Hence, the reference numerals 500 through 541 inthe embodiment of FIG. 10 denote like or corresponding parts indicatedby the reference numerals 400 through 441, respectively, in theembodiment of the glow discharge system shown in FIG. 9.

The conical electrodes 501, 502 consist essentially of welded or boltedtogether assemblies which incorporate appropriate cooling jackets 504,505 and associated mounting flanges 506, 507, respectively. The innersurfaces of the electrodes 501, 502 are either fabricated of the metalto be sputtered or of an easy to machine non-magnetic material, such asaluminum, stainless steel, and the like, and coated or plated with athick layer (not shown) of the metal or insulating material to besputtered. For example, the technique of plasma spraying can be used toapply suitably thick coatings with adequate adhesion for thisapplication.

The cooling jacket flanges 506, 507 enable the electrodes to be boltedtogether by a plurality of electrically insulating bolts 508, of nylonor the like, so that the electrically insulating ring 545 can becaptured between the flanges. O-ring grooves 546, 547 in the mountingflanges 506, 507, respectively, enable a vacuum seal to be formed.

As best observed in FIG. 10a, a plurality of overlapping baffles isdefined by a cylindrical lip 548 extending from the electrode 502towards the electrode 501, while a similar inner concentric cylindricallip 549 projects towards the electrode 502 from either the electrode 501or the cooling jacket 504. The lips 548, 549 shield the insulating ring545 from the plasma discharge and from the flux of sputtered material,so that the ring does not become overheated and, in the case ofsputtered conductive material, the inner face of the ring does notreceive a metallic coating that could cause the electrodes to beshort-circuited electrically.

It will be apparent from the foregoing descriptions that the combinationof electrode pairs and a suitably shaped magnetic field in a systemhaving axial symmetry is used to provide a trap for primary electronswhich restricts their motions both radially and axially, thereby causingthem to remain near the target surfaces until a large fraction of theirenergy has been expended in ionizing collisions. The closed plasmacontaining trap is formed on some sides by the magnetic fields and onthe remaining sides by the electrode surfaces which may or may notinclude end wing configurations depending upon the space required forthe primary electrons to lose their useful ionizing energy.

It will also be apparent that, while substrates to be coated arenormally spaced outside of the plasma to avoid undue heating, substratesmay, if desired, be deliberately bathed with plasma for heatingpurposes.

As mentioned previously, one of the principal advantages of the presentinvention is that relatively low operating pressures can be used. Thisuse of relatively low pressures for the working gas results in anessentially straight line emission of the sputtered material from thetarget and, hence, line of sight sputtering onto a substrate. Incontrast, where high operating pressures are involved, such as intypical prior art apparatus, the sputtered material becomes gasscattered and tends to move in other than a line of sight direction. Asa consequence, some of the sputtered material is turned back to thecathode and the deposition rate is reduced. In addition, the gasscattering coats not only the particular surface of a substrate facingthe target, but may also coat other surfaces, such as the sides andrear, depending upon the orientation of the substrate with respect tothe target.

The use of relatively low pressures also enables a large area ofdeposition. This occurs because the mean free path or average length ofcollisionless line of sight motion of the sputtered material variesinversely with the pressure. Hence, a sputtering system in accordancewith the invention can be operated at relatively low pressures andthereby permit substrates located at large radii to still see a line ofsight flux of coating material. Therefore, the invention permits the useof large chambers with attendant large deposition areas. For example, anexemplary radius for a vacuum chamber used in accordance with thepresent invention is typically 18 inches, but the operating pressure canbe made low enough so that the chamber size can be increased to placethe substrates even 30 inches away from the target without undergoingserious departures from the line of sight flux of the sputteredmaterial. With average electrode diameters typically in the range of 3to 6 inches, satisfactory stable operation can be obtained for pressuresranging from approximately 0.5 microns to in excess of 20 microns.Working gas pressures in the range of 0.5 microns to 1 micron appear tobe preferable. An exemplary length for the double electrodeconfiguration is from several inches to several feet, a typicaloperating length being 2 feet.

It will further be apparent that glow discharge systems constructed inaccordance with the present invention possess the very significantadvantage of being scalable. In this regard, the diameter and length ofthe target electrodes can be readily changed over a wide dimensionalrange while still obtaining satisfactory operation.

Since the invention permits operation at such low working gas pressuresthat sputtered material from all points along a target electrode lengthcan reach a given substrate position with line of sight trajectories, itis possible to analytically perdict with considerable accuracy what theinfluence would be of baffles placed between the target electrodes andthe substrate. Accordingly, such baffles can be used to deposit coatingswith controlled gradations in coating thickness and to extend thesubstrate area over which uniform coating thicknesses are obtained.

Another advantage of the glow discharge technique of the presentinvention is the ability to operate at a relatively low voltage. Sincethe sputtering yield (atoms sputtered per incident ion) increases lessthan linearly for higher ion energies, more sputtering is obtained atlow voltage operation for a given power input than at high voltageoperation. In addition, low voltage, high current operation means thathigher power levals can be delivered to the sputtering apparatus withoutcostly insulation problems in the design of power supplies and thesputtering equipment per se. In the usual prior art sputteringapparatus, the applied voltage is approximately 3,000 volts,necessitating great care in providing proper insulation. On the otherhand, depending upon the particular target material chosen, andparticularly whether it is electrically conductive or a dielectricmaterial, the typical range of operating voltages with apparatusconstructed in accordance with the present invention is fromapproximately 300 volts to 2200 volts, with 1100 volts being typical fora hollow cathode configuration sputtering an aluminum oxide dielectric.The working gas pressure can be increased several times withoutsignificantly affecting the operating voltage required.

An additional advantage is that substrate heating is held to a minimumwhere desired, because there is very small plasma bombardment. Thisresults because the plasma is contained around the target electrodes.Therefore, the apparatus can be used with substrate materials that meltor off-gas easily. In addition, the apparatus of the present inventioncan be used to deliberately bathe the substrate in plasma by eithermoving the substrate to the plasma region or reducing the magnetic fieldstrength to enable primary electrons to reach the substrate.

A further advantage is that the overall system provided by the presentinvention is electrically very stable and can be dependably operated formany hours with minimum drift in electrical operating parameters.

Typical yields with systems of the present invention, from a doubleelectrode, hollow cathode configuration, using conical cathodes with anaverage diameter of 5 inches and a total length for both electrodes ofapproximately 24 inches, with an r.f. frequency of 1.8 megacycles, 0.70microns working gas pressure, and 5 killowatts r.f. power input at 1160volts rms across both the plasma and the target electrodes, provide anaverage deposition rate for an aluminum oxide ceramic cathode surface of200 Angstroms per minute.

The method and apparatus of the present invention provide a plasma trapof such sufficiency that the replenishing requirements for sustaining aplasma within the trap are minimized to the point that the burdennormally placed on the target as a cathode does not interfere in anysubstantial way with the sputtering process. Hence, coupling between theprocess of sustaining an intense plasma discharge over the targetsurface, and the sputtering process itself, is minimized. Therefore, theinvention removes the requirements for any assist discharge, secondpower supply, and other like disadvantages of prior art dischargesystems affecting efficiency, yield, cost, complexity and the like. Inthis regard, the present invention satisfies a long existing need forimproved glow discharge systems and techniques for such applications assputtering, polymerization, vapor deposition, light sources, radiationsources, cathodic etching, and any other application requiring thegeneration of plasma or a flux of sputtered material.

It will be apparent from the foregoing that, while particular forms ofthe invention have been illustrated and described, various modificationscan be made without departing from the spirit and scope of theinvention. Accordingly, it is not intended that the invention be limitedexcept as by the appended claims.

We claim:
 1. A method of generating a glow discharge, comprising thesteps of:supporting a pair of electrodes within a working gasenvironment; applying electrical voltage across said electrodes; andforming a magnetic field which defines, together with said electrodes, aplurality of separate traps with each electrode to contain substantiallyall electrons emitted from said electrodes and having sufficient energyto further ionize said working gas.
 2. A method as set forth in claim 1,and further including:maintaining said working gas environment at apressure of 1 micron or less.
 3. A method as set forth in claim 1,wherein said voltage is an r.f. voltage.
 4. A method as set forth inclaim 1, wherein said each of traps has axial symmetry about an axis ofrotation.
 5. A method as set forth in claim 4, wherein said axialsymmetry is defined by said magnetic field.
 6. A method as set forth inclaim 4, wherein said axial symmetry is defined by said electrodes.
 7. Amethod as set forth in claim 4, wherein said axial symmetry is definedby both said magnetic field and said electrodes.
 8. A method as setforth in claim 1, wherein said magnetic field is formed from within saidelectrodes.
 9. A method as set forth in claim 1, wherein said magneticfield is formed from a location external to said electrodes.
 10. Amethod as set forth in claim 1, wherein said electrodes include asputtering surface comprised of an electrically conductive material. 11.A method as set forth in claim 1, wherein said electrodes include asputtering surface comprised of an electrically insulating material. 12.A method as set forth in claim 1, wherein said electrodes are coaxial.13. A method as set forth in claim 1, wherein said electrodes are in apost type configuration with the glow discharge being generatedexternally of said electrodes.
 14. A method as set forth in claim 1,wherein said electrodes are hollow and said glow discharge is generatedinternally of said electrodes.
 15. A method as set forth in claim 1,wherein each of said electrodes defines a conical surface of revolution.16. A method as set forth in claim 1, and further including:electricallyshielding said electrodes and working gas environment against r.f.leakage.
 17. A method of sputtering material from a pair of targetelectrodes onto a substrate, comprising the steps of:disposing saidelectrodes within a low pressure working gas environment; forming amagnetic field which defines, together with said electrodes, a pluralityof separate traps with each electrode to contain substantially allelectrons emitted from said electrodes and having sufficient energy tocreate additional ions; and applying an r.f. voltage across said targetelectrodes.
 18. A method as set forth in claim 17, and furtherincluding:maintaining said working gas environment at a pressure of 1micron or less.
 19. A method as set forth in claim 17, wherein all ofsaid traps have axial symmetry about an axis of rotation.
 20. A methodas set forth in claim 19, wherein said axial symmetry is defined by saidmagnetic field.
 21. A method as set forth in claim 19, wherein saidaxial symmetry is defined by said electrodes.
 22. A method as set forthin claim 19, wherein said axial symmetry is defined by both saidmagnetic field and said electrodes.
 23. A method as set forth in claim17, wherein said magnetic field is formed from within said electrodes.24. A method as set forth in claim 17, wherein said magnetic field isformed from a location external to said electrodes.
 25. A method as setforth in claim 17, wherein said electrodes include a sputtering surfacecomprised of an electrically conductive material.
 26. A method as setforth in claim 17, wherein said electrode assembly includes a sputteringsurface comprised of an electrically insulating material.
 27. A methodas set forth in claim 17, wherein said electrodes are coaxial.
 28. Amethod as set forth in claim 17, wherein said electrodes are in a posttype configuration with the glow discharge being generated externally ofsaid electrodes.
 29. A method as set forth in claim 17, wherein saidelectrodes are hollow and said glow discharge is generated internally ofsaid electrodes.
 30. A method as set forth in claim 17, wherein each ofsaid electrodes defines a conical surface of revolution.
 31. A method asset forth in claim 17, and further including:electrically shielding saidelectrodes and working gas environment against r.f. leakage.
 32. In anr.f. glow discharge system, the combination comprising:a pair of shapedelectrodes, said electrodes being appropriately shaped and located tocomplement a magnetic field in providing electron trap boundaries; andmeans for forming a magnetic field which defines, in cooperation withsaid shaped electrodes, a plurality of separate traps with eachelectrode for containing substantially all electrons emitted from saidelectrodes and having sufficient energy to create additional ions.
 33. Acombination as set forth in claim 32, wherein said electrodes aredisposed in a gaseous environment at a pressure of one micron or less.34. A combination as set forth in claim 32, wherein each of said trapshas axial symmetry about an axis of rotation.
 35. A combination as setforth in claim 1, and further including:means for electrically shieldingsaid electrodes and said glow discharge against r.f. leakage.
 36. Acombination as set forth in claim 32, wherein said means for forming amagnetic field is located within said electrodes.
 37. A combination asset forth in claim 32, wherein said means for forming said magneticfield is external of said electrodes.
 38. A combination as set forth inclaim 32, wherein said electrodes are in a post type configuration withthe glow discharge being generated externally of said electrodes.
 39. Acombination as set forth in claim 32, wherein said electrodes are hollowand said glow discharge is generated internally of said electrodes. 40.A combination as set forth in claim 32, wherein each of said electrodesis adapted to include a sputtering surface comprising an electricallyconductive material.
 41. A combination as set forth in claim 32, whereineach of said electrodes is adapted to include a sputtering surfacecomprising an electrically insulating material.
 42. Glow dischargeapparatus, comprising:a pair of shaped electrodes, said electrodes beingappropriately shaped and located to complement a magnetic field inproviding electron trap boundaries; mounting means for supporting saidelectrodes in close, spaced apart relationship in a low pressure workinggas environment; power supply means for supplying an electrical voltageacross said pair of electrodes; and magnetic field means for forming amagnetic field which defines, in cooperation with said shaped electrodesa plurality of separate completely closed traps with each electrode forcontaining substantially all electrons emitted from said electrodes andhaving sufficient energy to further ionize said working gas. 43.Apparatus as set forth in claim 42, wherein said working gas is at apressure of 1 micron or less.
 44. Apparatus as set forth in claim 42,wherein said electrical voltage applied across said pair of electrodesis an r.f. voltage.
 45. Apparatus as set forth in claim 42, wherein eachof said traps has axial symmetry about an axis of rotation. 46.Apparatus as set forth in claim 42, wherein said mounting means supportssaid electrodes in coaxial relationship to each other.
 47. Apparatus asset forth in claim 42, wherein said electrodes are in a post-typeconfiguration with said glow discharge being generated externally ofsaid electrodes.
 48. Apparatus as set forth in claim 42, wherein saidelectrodes are hollow and said glow discharge is generated internally ofsaid electrodes.
 49. Apparatus as set forth in claim 42, wherein each ofsaid electrodes defines a conical surface of revolution.
 50. Apparatusas set forth in claim 42, wherein said magnetic field means is locatedwithin said electrodes.
 51. Apparatus as set forth in claim 42, whereinsaid magnetic field means is located externally of said electrodes.